|
Material |
Purity |
Configurations |
|
Al & Al alloy |
5N, 5N5 |
Varian TM , MRC TM , KDF TM, ANELVA TM , ULVAC TM Oerlikon (Balzer) TM , AMAT TM , Novellus TM , etc Other configurations available acc. to customer’s specs. |
|
Cu |
5N, 6N |
|
|
Ti |
4N5, 5N |
|
|
Ta |
4N, 4N5 |
|
|
Co |
5N |
|
|
NiV |
3N5 |
|
|
NiCr |
3N5 |
|
|
NiPt |
3N5 |
|
|
Cr |
3N5, 4N |
|
|
Mo |
3N5 |
|
|
WTi |
4N,4N5 |
|
|
Ni |
4N, 4N5 |
|
|
Ag |
4N, 5N |
|
|
Au |
4N, 5N |
|
|
Pt |
4N |
